| 摘要 |
PROBLEM TO BE SOLVED: To provide a coating liquid supply apparatus which can shorten the operation stop time for a filter exchange, and reduces the variation of a coating quality, and to provide a filter line switching method. SOLUTION: The coating liquid supply system 100 is provided with two filter lines 10 and 20, one of which is used to supply a coating liquid 11 to a coating apparatus 2. The filter lines 10 and 20 are connected in parallel, and each filter 13 and 23 and a filter pump 5 are connected in series. When switching the filter line in use, the injection of coating liquid 11 to the filter of the standby filter line begins. After the coating liquid is filled to the filter in standby, the injection of coating liquid is stopped. Afterwards, the standby filter line is switched to be in use. COPYRIGHT: (C)2011,JPO&INPIT
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