| 摘要 |
<p>PURPOSE: A substrate processing apparatus is provided to prevent the generation of time interference while loading and unloading processes by adjusting a loading timing and an unloading timing during a substrate processing process. CONSTITUTION: A loading and unloading part(200) loads and unloads substrates. A circulating rail(300) is arranged between the loading and unloading part and a processing part. A plurality of transferring parts(400) is transferred along the circulating rail and supplies loaded substrates to the processing part. The transferring parts unload processed substrates and supply the processed substrate to the loading and unloading part.</p> |
