| 摘要 |
According to the present invention, there is provided a vertical heat treatment apparatus which is a vertical heat treatment furnace comprising at least: a reaction tube; a heat treatment boat configured to hold a substrate; a heater configured to heat the substrate; a gas introduction tube configured to introduce an atmospheric gas into the reaction tube; a gas supply tube connected to the gas introduction tube; and a gas port portion that is formed at a flange body provided under the reaction tube or the reaction tube and into which the gas introduction tube is inserted, wherein the gas introduction tube is connected to the gas supply tube through a joint outside the reaction tube, the joint has at least a metal short tube having a flange portion, and the gas introduction tube is inserted into a through hole formed by connecting the flange portion of the metal short tube to the flange portion provided at the gas port portion through an O-ring and further connected to the gas supply tube through the joint. As a result, there can be provided the vertical heat treatment apparatus that can avoid damages to the gas introduction tube and easily achieve connection between the gas introduction tube and the gas supply tube without haze on a substrate.
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