发明名称 |
USE OF A TARGET FOR SPARK EVAPORATION, AND METHOD FOR PRODUCING A TARGET SUITABLE FOR SAID USE |
摘要 |
The invention relates to a method for using a target for a coating process of metal oxide and/or metal nitride coatings by means of spark evaporation, wherein the target can be operated at a temperature that is higher than the melting point of the metal used in the target, and wherein the target is comprised of a metal whose oxides and/or nitrides are not electrically conducting. The invention further relates to the use of a target for producing metal oxide coatings and/or metal nitride coatings by means of spark evaporation, wherein the target has a matrix comprised of a metal, in which matrix non electrically conducting oxides and/or nitrides of the metal are embedded.
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申请公布号 |
US2011143054(A1) |
申请公布日期 |
2011.06.16 |
申请号 |
US200913059257 |
申请日期 |
2009.08.10 |
申请人 |
OERLIKON TRADING AG, TRUEBBACH |
发明人 |
KURAPOV DENIS;LECHTHALER MARKUS |
分类号 |
C23C26/00;B05D5/06 |
主分类号 |
C23C26/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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