发明名称 THIN FILM TRANSISTOR ARRAY SUBSTRATE AND METHOD THEREOF
摘要 <p>PURPOSE: A thin film transistor substrate and manufacturing method thereof are provided to form a column spacer and a dummy column spacer together, thereby preventing defects due to static electricity. CONSTITUTION: A thin film transistor is formed on an insulating substrate(10). The thin film transistor includes a gate electrode, a semiconductor layer(40), a source electrode(65), and a drain electrode(66). A dummy pattern includes an opening which exposes the insulating substrate. A dummy column spacer(91) buries the opening. The dumpy column spacer is made of organic insulating materials.</p>
申请公布号 KR20110064639(A) 申请公布日期 2011.06.15
申请号 KR20090121324 申请日期 2009.12.08
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 KOO, BON YONG
分类号 H01L29/786 主分类号 H01L29/786
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