| 摘要 |
PURPOSE: A method for controlling the temperature of a vertical growth type furnace is provided to automatically form a desired temperature environment in a process for forming a single crystalline ingot, thereby maintaining the quality of an ingot even though the length of the single crystalline ingot is lengthened. CONSTITUTION: A heater(130) and a temperature sensor(140) are placed in a furnace(110). The heater heats a quartz furnace(120). The temperature sensor measures the temperature of the furnace heated by the heater. The temperature sensor transmits the information about the measured temperature to a computer(150). A dual loop PID temperature controller(160) heats the heater or stops the operation of the heater according to a received temperature control signal. A temperature sensor(170) measures a temperature by each area of the furnace.
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