| 摘要 |
PROBLEM TO BE SOLVED: To provide a gas laser oscillator which does not use a circulating pump, cuts a thick plate excellently, and has excellent maintainability. SOLUTION: The gas laser oscillator includes at least two discharge tubes 25, 26 having laser gas inside, electrodes 21-24 arranged on the discharge tubes 25, 26, and high-voltage power supplies 31, 32 for supplying power for discharge to the electrodes 21-24. The discharge tubes 25, 26 are arranged in parallel to a travelling direction of laser light. Parallel flat plates 41 as a flow passage for passing laser gas between the discharge tubes 25, 26 are arranged, and a refrigerant is arranged inside the parallel flat plates 41. The high-voltage power supplies 31, 32 alternately discharge the electrodes 21-24 of the discharge tubes 25, 26. COPYRIGHT: (C)2011,JPO&INPIT
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