| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing a moving mechanism that facilitates suppressing failures caused by entry of foreign matter. SOLUTION: The moving mechanism has a reference part and a moving object part, at least one of which has an inner cavity, and the moving object part being supported by a support disposed in the reference part, and the moving object part being moved in a distance within a predetermined range on the basis of the reference part. The moving mechanism is manufactured by sequentially performing the following steps (1) to (3): (1) a step of forming a laminating member in which a plurality of unit parts each including the reference part and the moving object part are arrayed at a predetermined rule, (2) a step of cutting the laminating member while a suppression structure to suppress the passage of a substance from the outside to the inner cavity is formed between the reference part and the moving object part, then, separating the laminating member for each of the units, and (3) a step of making the moving object part movable in the distance within the predetermined range on the basis of the reference part, in accordance with the status change of the suppression structure. COPYRIGHT: (C)2011,JPO&INPIT
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