| 摘要 |
PROBLEM TO BE SOLVED: To provide a multifunctional disk dovetail groove stage whose whole shape is compact in construction, and to which various functions can be selected and added as fulfillable ones. SOLUTION: The multifunctional disk dovetail groove stage 1 includes: a first feed-screw-type dovetail groove stage 2 which is fixed to a base with fastening implements, and slides in one direction; a second feed-screw-type dovetail groove stage 3 which slides in a direction crossing that of the first feed-screw-type stage 2; and a rotary sliding stage 4 on which a precision apparatus is mounted. The first feed-screw-type stage 2, the second feed-screw-type stage 3, and the rotary sliding stage 4 have disklike external shapes respectively, and are laminated in the vertical direction. COPYRIGHT: (C)2011,JPO&INPIT
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