ACTUATOR, STAGE APPARATUS, EXPOSURE APPARATUS

摘要

PURPOSE: An actuator, a stage device, and a light exposure device are provided to overcome spatial restriction by miniaturizing the actuator. CONSTITUTION: A ball screw member(20) includes a ball screw unit(22) and a ball nut unit(23) coupled with a base member(10). A driving member(30) is coupled with the ball nut unit so that the driving member is operated together with the ball nut unit. A first direction displacement member(40) moves in a first direction in connection with the driving member. A wedge member(50) is coupled with the driving member and moves in a second direction. A second direction displacement member(60) is coupled with the wedge member and moves in the second direction.