| 发明名称 |
Cholate photoacid generators and photoresists comprising same |
| 摘要 |
New photoacid generator compounds ("PAGs") are provided that comprise a cholate moiety and photoresist compositions that comprise such PAG compounds. |
| 申请公布号 |
EP2332960(A2) |
申请公布日期 |
2011.06.15 |
| 申请号 |
EP20100194457 |
申请日期 |
2010.12.10 |
| 申请人 |
ROHM AND HAAS ELECTRONIC MATERIALS LLC |
发明人 |
AQAD, EMAD;LI, MINGQI;MATTIA, JOSEPH |
| 分类号 |
C07J9/00;C07C381/12;C07J31/00;G03F7/004;G03F7/038 |
主分类号 |
C07J9/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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