OPTISCH-LEITENDE SCHICHT, OPTOELEKTRISCH- LEITENDES SUBSTRAT, MONTIERTES SUBSTRAT UND DEREN HERSTELLUNGSVERFAHREN

摘要

A first clad (504) layer is formed on a smooth support substrate (559) via a release layer (531). On the first clad layer (504), a core (501) through which light propagates and alignment marks (507, 515) are simultaneously formed. Further, these layers are covered with a second clad (506) to obtain an optical wiring layer (51). Then, the optical wiring layer (51) is released from the support substrate (559) and stuck to a substrate (52) having an electric wiring (519). Subsequently, on the resulting optical wiring layer is formed a mirror (505, 512) for reflecting light propagating through the core (501), pads (509, 510) for installing optical parts (58, 59)or the like, and via holes (523) for electrically connecting the electric wiring (519) on the substrate (52) to the pads (509, 510). For this formation, the alignment marks (507, 515) are used as references.