发明名称 SEAL RING OF IMAGE SENSOR AND MANUFACURING METHOD OF SEAL RING OF IMAGE SENSOR
摘要 PURPOSE: The sealing of an image sensor and a method for manufacturing the sealing of the image sensor are provided to increase the high temperature resistance of the sealing by forming the sealing in a multiple partition structure and a supporting wall structure. CONSTITUTION: A plurality of element isolation films(112) is formed at the semiconductor substrate(110) in the peripheral side of the chip region of an image sensor and defines a sealing region. An insulating film(120) is formed on the semiconductor substrate in the sealing region and is formed into a multiple stacked structure. A plurality of contact plugs(122, 132, 142) or vias are formed on the insulating film to surround the chip region and are formed into partition structures.
申请公布号 KR20110065179(A) 申请公布日期 2011.06.15
申请号 KR20090122052 申请日期 2009.12.09
申请人 DONGBU HITEK CO., LTD. 发明人 PARK, YU BE
分类号 H01L27/146 主分类号 H01L27/146
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