发明名称 AUTOMATIC CLEANING APPARATUS OF SCRUBBER CHAMBER FOR TREATING WASTE GAS
摘要 PURPOSE: An automatic chamber washing apparatus is provided to automatically remove powder adhered on a heating chamber and to improve productivity. CONSTITUTION: An automatic chamber washing apparatus(100) of a scrubber for disposal of waste gas comprises: an upper water spray nozzle(110) which is mounted at the upper inner wall of a heating chamber(11); a side water spray nozzle(120) which is mounted at the middle portion of side inner wall of the heating chamber; a lower water spray nozzle(130) which is mounted at the lower end portion of the side inner wall of the heating chamber; first, second and third water supply pipe(141,142,143) connected to the upper, side, and lower water spray nozzles; and a controller(160) for controlling first, second, and third opening/closing valves.
申请公布号 KR20110064578(A) 申请公布日期 2011.06.15
申请号 KR20090121248 申请日期 2009.12.08
申请人 DONGBU HITEK CO., LTD. 发明人 KIM, DO YEON
分类号 B01D47/12;B01D47/06;H01L21/02 主分类号 B01D47/12
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