DEVICE FOR SEMICONDUCTOR'S DIFFUSION STEP INCLUDING QUATZ BOAT AND ITS USING METHOD

摘要

PURPOSE: A semiconductor wafer diffusing device with a quartz boat and diffusing process using the same are provided to apply a bi-pitch method or a narrow-pitch method to a quartz boat, thereby increasing the amount of producing processed wafers by loading more wafers. CONSTITUTION: An upper slot, a lower slot, and a support stand are loaded on a wafer(930). A plurality of protrusion units is included in the combining unit of the upper and lower slots. A first protrusion unit(910) and a second protrusion unit(920) have different widths. The width of the first protrusion unit has a lower width which is 1.0 to 2.0 mm. The width of the second protrusion unit has a lower width which is 2.0 to 3.0 mm.