X-ray detector for electron microscope

摘要

Multiple detectors (202) arranged in a ring within a specimen chamber provide a large solid angle of collection. The detectors (202) preferably include a shutter (108) and a cold shield (110) that reduce ice formation on the detector (202). By providing detectors (202) surrounding the sample (204), a large solid angle is provided for improved detection and x-rays are detected regardless of the direction of sample (204) tilt.