| 摘要 |
PURPOSE: A wafer cassette for high density plasma chemical vapor deposition is provided to form a heat-resistant coating layer on one side of a slot, thereby preventing deformation due to melting. CONSTITUTION: A cassette main body(110) is made of a square plastic material whose top is opened to perform high density plasma chemical vapor deposition. A plurality of cassette slots(120) supports a plurality of wafers(20) on both sides of the cassette main body. A heat-resistant coating layer is formed on one side of a cassette slot. The heat-resistant coating layer is made of stainless steel.
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