MANUFACTURING PROCESS OF NANO-STRUCTURED COMPOUND THERMOELECTRIC MATERIALS USING METAL ORGANIC CHEMICAL VAPOR DEPOSITION

摘要

PURPOSE: A method for manufacturing a nano-structured compound thermoelectric semiconductor by a metal organic chemical vapor deposition method is provided to economically increase a thermoelectric index of a thermoelectric element. CONSTITUTION: A metal organic compound precursor is transferred to a reaction tube(S01). The metal organic compound precursor is thermally decomposed(S02). The thermally decomposed precursor is crystallized by a nano size unit(S03). The crystallized precursor is applied on a substrate to form a thin film or a thick film(S04).