| 摘要 |
PURPOSE: An exhaust pressure measure system is provided to detect the clogging of a rear exhaust line of a scrubber through pressure change in initial time. CONSTITUTION: An exhaust pressure measure system comprises a connection pipe(110), a chamber, and a pressure sensor(130). The connection pipe is connected to the center part of the exhaust line transferring reaction by-product gas and comprises an opening(121a). The chamber is included on the outside of the connection pipe and is communicated with the connection pipe. The chamber is connected with a nitrogen supply line for the nitrogen gas supply from the outside. The pressure sensor is installed on the chamber. The pressure sensor measures the pressure of the chamber and exhaust pressure change of the exhaust line.
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