发明名称 Predicting wafer failure using learned probability
摘要 Techniques for estimating a quality of one or more wafers are presented. One or more first wafers comprising one or more first dies are tested. A probability of wafer failure is determined in accordance with one or more first test measurements of the one or more first dies. A pass status and/or a fail status of one or more second wafers is inferred by testing a select one or more second dies of the one or more second wafers and evaluating one or more second test measurements of the select one or more second dies in accordance with the determined probability of wafer failure.
申请公布号 US7962302(B2) 申请公布日期 2011.06.14
申请号 US20080329868 申请日期 2008.12.08
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 BASEMAN ROBERT JEFFREY;CONTI SUSAN G.;MUTH WILLIAM A.;ROSEN-ZVI MICHAL;SCHOLL FREDERICK A.
分类号 G06F19/00 主分类号 G06F19/00
代理机构 代理人
主权项
地址