| 摘要 |
Provided is a noncontact apparatus for performing rotating process to a subject to be processed, without contaminating environment in an airtight container. A spin head (1) is held on a holder (7) in an airtight container, a pinning force is generated between the spin head (1) and a Type-II superconductor (11), and the spin head 1 is floated by lifting the Type-II superconductor (11) by a lifting means (22). Then, rotating force generated by a noncontact rotating power transmitting body (18) arranged in the internal center of the Type-II superconductor (11) is subsequently generated on the side of the spin head (1) and the spin head (1) is rotated in conjunction with a driving motor (19).
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