发明名称 |
Pore phase change material cell fabricated from recessed pillar |
摘要 |
A method of manufacturing an electrode is provided that includes providing a pillar of a first phase change material atop a conductive structure of a dielectric layer; or the inverted structure; forming an insulating material atop dielectric layer and adjacent the pillar, wherein an upper surface of the first insulating material is coplanar with an upper surface of the pillar; recessing the upper surface of the pillar below the upper surface of the insulating material to provide a recessed cavity; and forming a second phase change material atop the recessed cavity and the upper surface of the insulating material, wherein the second phase change material has a greater phase resistivity than the first phase change material.
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申请公布号 |
US7960203(B2) |
申请公布日期 |
2011.06.14 |
申请号 |
US20080021577 |
申请日期 |
2008.01.29 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
SCHROTT ALEJANDRO G.;LAM CHUNG H.;JOSEPH ERIC A.;BREITWISCH MATTHEW J.;CHEEK ROGER W. |
分类号 |
H01L21/00 |
主分类号 |
H01L21/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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