发明名称 Integrated absolute and differential pressure transducer
摘要 A method and apparatus integrates differential pressure measurements and absolute pressure measurements to provide a continuous absolute pressure profile over a wide range of pressures on a single integrated scale. The absolute pressure measurements and differential pressure measurements are obtained, and a correlation factor between the absolute pressure measurements and the differential pressure measurements is determined. The correlation factor is used to normalize the differential pressure measurements to virtual absolute pressure values on a common absolute pressure scale with the absolute pressure measurements. An absolute pressure profile over a wide pressure range includes the absolute pressure measurements in a portion of the range where the absolute pressure measurements are accurate, and it includes the virtual absolute pressure values in another portion of the range where the differential pressure measurements are accurate.
申请公布号 US7962294(B2) 申请公布日期 2011.06.14
申请号 US20090353201 申请日期 2009.01.13
申请人 MKS INSTRUMENTS, INC 发明人 DOZORETZ PAUL;GU YOUFAN;HOLCOMB GARRY;WENZEL OLE
分类号 G01F23/14;G01L13/00;G01L27/00 主分类号 G01F23/14
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