Immersion exposure apparatus and device manufacturing method with no liquid recovery during exposure,申请号US11355965-传众专利搜索

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发明名称	Immersion exposure apparatus and device manufacturing method with no liquid recovery during exposure
摘要
申请公布号	US7961289(B2)	申请公布日期	2011.06.14
申请号	US11355965	申请日期	2006.02.17
申请人		发明人
分类号	G03B0027/000052	主分类号	G03B0027/000052
代理机构		代理人
主权项
地址

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