发明名称 |
Glass-ceramic-based semiconductor-on-insulator structures and method for making the same |
摘要 |
The present invention relates to a semiconductor-on-insulator structure including a semiconductor component comprised of substantially single-crystal semiconductor material layer and a single-crystal semiconductor material with an enhanced oxygen content layer; an oxide glass material layer; and a glass-ceramic layer.
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申请公布号 |
US7960736(B2) |
申请公布日期 |
2011.06.14 |
申请号 |
US20080238784 |
申请日期 |
2008.09.26 |
申请人 |
CORNING INCORPORATED |
发明人 |
GADKAREE KISHOR P.;PINCKNEY LINDA R. |
分类号 |
H01L31/0312;H01L21/20;H01L21/36;H01L21/76;H01L27/01;H01L27/12;H01L31/0392 |
主分类号 |
H01L31/0312 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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