发明名称 |
MAGNETOMETRO TRIASSIALE INTEGRATO DI MATERIALE SEMICONDUTTORE REALIZZATO IN TECNOLOGIA MEMS |
摘要 |
Two suspended masses (1, 3) are configured so as to be flowed by respective currents (I) flowing in the magnetometer plane in mutually transversal directions and are capacitively coupled to lower electrodes (18b). Mobile sensing electrodes (11) are carried by the first suspended mass (1) and are capacitively coupled to respective fixed sensing electrodes (12). The first suspended mass (1) is configured so as to be mobile in a direction transversal to the plane in presence of a magnetic field having a component in a first horizontal direction (X). The second suspended mass (3) is configured so as to be mobile in a direction transversal to the plane in presence of a magnetic field having a component in a second horizontal direction (Y), and the first suspended mass is configured so as to be mobile in a direction parallel to the plane and transversal to the current flowing in the first suspended mass in presence of a magnetic field having a component in a vertical direction (Z). |
申请公布号 |
ITTO20090973(A1) |
申请公布日期 |
2011.06.11 |
申请号 |
IT2009TO00973 |
申请日期 |
2009.12.10 |
申请人 |
STMICROELECTRONICS S.R.L. |
发明人 |
BALDO LORENZO;PROCOPIO FRANCESCO;ZERBINI SARAH |
分类号 |
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主分类号 |
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代理机构 |
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代理人 |
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主权项 |
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地址 |
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