| 摘要 |
<p>PURPOSE: A substrate transfer apparatus is provided to stably transfer substrates through side rollers even if transfer shafts are installed at high inclination to the ground. CONSTITUTION: A substrate transfer apparatus comprises a plurality of cylindrical side rollers(150a,150b) and a plurality of transfer shafts(110). The transfer shafts are arranged at an angle over the threshold to the ground and have a plurality of rollers(120) which contact the bottom of a substrate(G) and rotate. The side rollers are rotated as contacting the side of the substrate to transfer the substrate in the specific direction and prevent the separation of the substrate.</p> |
