TEACHING TOOL FOR ALIGNING ROBOT OF SUBSTRATE PROCESSING APPARATUS

摘要

PURPOSE: A teaching jig for aligning the robot of a substrate processing apparatus is provided to improve the operational efficiency and the productivity by preventing the mis-alignment of the robot. CONSTITUTION: A teaching jig(10) is located at the position the same as the substrate. A first measuring groove(14) is formed at the upper center of the teaching jig. A second measuring groove(16) is formed on both edges of a plate shaped body(12). An index transferring robot(30) and a main transferring robot(40) are arranged, and a buffer unit(20) is arranged between the index transferring robot and the main transferring robot. The teaching jig is mounted at the substrate slot(22) of the buffer unit.