发明名称 |
APPARATUS FOR TRANSFER INTER-LAYER USED IN MANUFACTURING FLAT PANEL DISPLAY |
摘要 |
<p>PURPOSE: An interlayer transferring apparatus for a flat display manufacturing process is provided to control the operational time required for layers by arranging a buffer space between the layers. CONSTITUTION: A housing includes a first entrance(112) and a second entrance(114). A first elevator(200-1) transfers a substrate between the first entrance and the second entrance. A second elevator transfers the substrate between the first entrance and the second entrance. The elevators include conveyors including a plurality of transferring shafts(222). The first elevator faces the second elevator in the housing.</p> |
申请公布号 |
KR20110062539(A) |
申请公布日期 |
2011.06.10 |
申请号 |
KR20090119293 |
申请日期 |
2009.12.03 |
申请人 |
SEMES CO., LTD. |
发明人 |
LEE, CHANG YONG;JEON, EUN SU |
分类号 |
H01L21/677;B65G47/68;B65G49/06;G02F1/13 |
主分类号 |
H01L21/677 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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