发明名称 APPARATUS FOR TRANSFER INTER-LAYER USED IN MANUFACTURING FLAT PANEL DISPLAY
摘要 <p>PURPOSE: An interlayer transferring apparatus for a flat display manufacturing process is provided to control the operational time required for layers by arranging a buffer space between the layers. CONSTITUTION: A housing includes a first entrance(112) and a second entrance(114). A first elevator(200-1) transfers a substrate between the first entrance and the second entrance. A second elevator transfers the substrate between the first entrance and the second entrance. The elevators include conveyors including a plurality of transferring shafts(222). The first elevator faces the second elevator in the housing.</p>
申请公布号 KR20110062539(A) 申请公布日期 2011.06.10
申请号 KR20090119293 申请日期 2009.12.03
申请人 SEMES CO., LTD. 发明人 LEE, CHANG YONG;JEON, EUN SU
分类号 H01L21/677;B65G47/68;B65G49/06;G02F1/13 主分类号 H01L21/677
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