| 摘要 |
<p>PURPOSE: A sputter deposition apparatus for manufacturing a solar cell is provided to reduce deposition costs by reducing the replacement time and costs of a sputter target. CONSTITUTION: A sputter deposition apparatus for manufacturing a solar cell comprises a vacuum chamber(10), a sputter unit(20), and a vacuum separation unit(60). The vacuum chamber provides a reaction space. The sputter unit is installed on the top of the vacuum chamber. A sputter target(23), corresponding to the top of a substrate, is installed in the sputter unit. The vacuum separation unit separates the mounting space of the sputter unit from the vacuum chamber and opens and closes the mounting space of the sputter unit.</p> |
