| 摘要 |
A hard laminated film wherein a layer A and a layer B having specific compositions are deposited alternately so that the compositions of layer A and layer B are different. The thickness of layer A per layer is twice or more the thickness of layer B per layer, the thickness of layer B per layer is 0.5 nm or more, and the thickness of layer A per layer is 200 nm or less. Layer A has a cubic rock-salt crystal structure such as that of Ti, Cr, Al, V nitride, carbonitride or carbide, and layer B is a hard film having a crystal structure other than cubic such as that of BN, BCN, SiN, SiC, SiCN, B-C, Cu, CuN, CuCN or metallic Cu. Alternatively, layer A has a chemical composition satisfying the following formula (1), and layer B has a chemical composition satisfying the following formula (2). Layer A: Cr(B<SUB>a</SUB>C<SUB>b</SUB>N<SUB>1-a-b-c</SUB>O<SUB>c</SUB>) <?in-line-formulae description="In-line Formulae" end="lead"?>0<=a<=0.15, 0<=b<=0.3, 0<=c<=0.1, 0.2<=e<=1.1 (1)<?in-line-formulae description="In-line Formulae" end="tail"?> Layer B: B<SUB>1-s-t</SUB>C<SUB>s</SUB>N<SUB>t</SUB> <?in-line-formulae description="In-line Formulae" end="lead"?>0<=s 0.25, (1-s-t)/t<=1.5 (2)<?in-line-formulae description="In-line Formulae" end="tail"?> Alternatively, Layer A has a specific atomic ratio composition of (Ti<SUB>1-x-y</SUB>Al<SUB>x</SUB>M<SUB>y</SUB>)(B<SUB>a</SUB>C<SUB>b</SUB>N<SUB>1-a-b-c</SUB>O<SUB>c</SUB>) and Layer B has one or more specific atomic ratio compositions selected from among the compositions B<SUB>1-x-y</SUB>C<SUB>x</SUB>N<SUB>y</SUB>, Si<SUB>1-x-y</SUB>C<SUB>x</SUB>N<SUB>y</SUB>, C<SUB>1-x</SUB>N<SUB>x</SUB>, Cu<SUB>1-y</SUB>(C<SUB>x</SUB>N<SUB>1-x</SUB>)<SUB>y</SUB>. Alternatively, Layer A has one of the following Compositional Formulae 1 or 2. Formula 1: (Ti<SUB>1-x-y</SUB>Al<SUB>x</SUB>M<SUB>y</SUB>), (B<SUB>a</SUB>C<SUB>b</SUB>N<SUB>1-a-b-c</SUB>O<SUB>c</SUB>), Formula 2: (Cr<SUB>1-</SUB>alphaXalpha)(B<SUB>a</SUB>C<SUB>b</SUB>N<SUB>1-a-b-c</SUB>O<SUB>c</SUB>)<SUB>e </SUB>(X is one or more metal elements selected from among Ti, Zr, Hf, V, Nb, Ta, Mo, W, Al, Si. Layer B has the following compositional formula 3. Formula 3: M(B<SUB>a</SUB>C<SUB>b</SUB>N<SUB>1-a-b-c</SUB>O<SUB>c</SUB>). M is one or more metal elements selected from among W, Mo, V, Nb. |
