| 摘要 |
An interference-based MEMS device having a lower substrate including a substrate electrode; a lower membrane spaced apart from the lower substrate by a lower gap, the lower membrane including a lower membrane electrode; an upper membrane located on a side of the lower membrane opposite the lower substrate and spaced apart from the lower membrane by an upper gap, the upper membrane including an upper membrane electrode; and control circuitry configured to provide control voltages to the electrodes of the lower substrate, the lower membrane and the upper membrane to change the dimensions of the lower gap and the upper gap to control the reflective properties of the device with respect to light incident upon the lower substrate.
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