发明名称 Deformable mirror device with oscillating states for providing smaller controllable adjustment of light intensity
摘要 A mirror device including: a mirror arranged on a substrate, supported by a hinge, and arranged substantially parallel to the substrate; a plurality of address electrodes for deflecting the mirror to an ON state, an OFF state, or an oscillating state; and a drive circuit for applying a voltage to the plurality of address electrodes. The mirror device is controlled such that a voltage can be applied to a corresponding address electrode to deflect the mirror, and oscillation in the oscillating state can be started from a state of the deflected mirror.
申请公布号 US7956319(B2) 申请公布日期 2011.06.07
申请号 US20070004641 申请日期 2007.12.24
申请人 SILICON QUEST KABUSHIKI-KAISHA;OLYMPUS CORPORATION 发明人 MAEDA YOSHIHIRO;ISHII FUSAO;ICHIKAWA HIROTOSHI;ARAI KAZUMA
分类号 H01J3/14 主分类号 H01J3/14
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