发明名称 Etchant and method for fabricating a thin film transistor substrate including conductive wires using the etchant and the resulting structure
摘要 Provided are an etchant, a method for fabricating a wire using the etchant, and a method for fabricating a thin film transistor (TFT) substrate using the etchant. The etchant includes a material having the formula 1, ammonium acetic acid, and the remainder of deionized water, wherein the formula 1 is expressed by: M(OH)XLY  (1) where M indicates Zn, Sn, Cr, Al, Ba, Fe, Ti, Si, or B, X indicates 2 or 3, L indicates H2O, NH3, CN, COR, or NH2R, Y indicates 0, 1, 2, or 3, and R indicates an alkyl group.
申请公布号 US7955521(B2) 申请公布日期 2011.06.07
申请号 US20080035316 申请日期 2008.02.21
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 PARK HONG-SICK;KIM SHI-YUL;CHOUNG JONG-HYUN;SHIN WON-SUK
分类号 C09K13/00 主分类号 C09K13/00
代理机构 代理人
主权项
地址