| 发明名称 |
Polymerizable sulfonic acid onium salt and resin |
| 摘要 |
A resin that includes a repeating unit shown by the following formula (10) has an excellent performance as a radiation sensitive acid generator, and exhibits only a small adverse effect on the environment and a human body. wherein R1 represents a hydrogen atom or the like, M+ represents a specific cation, and n is an integer from 1 to 5.
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| 申请公布号 |
US7956142(B2) |
申请公布日期 |
2011.06.07 |
| 申请号 |
US20070514168 |
申请日期 |
2007.11.09 |
| 申请人 |
JSR CORPORATION;CENTRAL GLASS CO., LTD. |
发明人 |
NAGAI TOMOKI;EBATA TAKUMA;SHIMIZU MAKOTO;JODRY JONATHAN JOACHIM;NARIZUKA SATORU;FUJIWARA MASAKI |
| 分类号 |
C08F128/02 |
主分类号 |
C08F128/02 |
| 代理机构 |
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