发明名称 Methods of forming semiconductor structures
摘要 The present invention relates to methods of forming semiconductor structures. The methods may include disposing electrically conductive material within an opening in a first dielectric material, passivating an upper surface of the electrically conductive material and introducing materials to form an interlayer dielectric upon the passivated upper surface. The present invention also includes methods of passivating surfaces of a semiconductor structure with a nitrogen-containing species.
申请公布号 US7955976(B2) 申请公布日期 2011.06.07
申请号 US20090632595 申请日期 2009.12.07
申请人 MICRON TECHNOLOGY, INC. 发明人 YIN ZHIPING;JOST MARK
分类号 H01L21/44;H01L21/768 主分类号 H01L21/44
代理机构 代理人
主权项
地址
您可能感兴趣的专利