METHOD FOR FABRICATING OF SOLAR CELL

摘要

PURPOSE: A method for manufacturing a solar cell is provided to uniformly crystallize amorphous silicon and reduce the crystallization temperature of the amorphous silicon. CONSTITUTION: A bottom electrode(200) is formed on a substrate(100). A first amorphous silicon layer(310) is formed on the bottom electrode. A composite silicon layer(320) including an amorphous silicon layer(324) and a fine crystal silicon layer(322) is formed on a first amorphous silicon layer. A second amorphous silicon layer is formed on the composite silicon layer. The first amorphous silicon layer, the composite silicon layer, and the second amorphous silicon layer are crystallized.