发明名称 Wiring technique
摘要 An apparatus for supplying electrical power to a movable member. The apparatus includes a fixed member, the movable member moving relative to the fixed member, a flexible wiring member having an end connected to the movable member and another end connected to the fixed member, configured to transmit the electrical power from the fixed member to the movable member, and a cooling member configured to cool the fixed member.
申请公布号 US7955938(B2) 申请公布日期 2011.06.07
申请号 US20070865887 申请日期 2007.10.02
申请人 CANON KABUSHIKI KAISHA 发明人 UKAJI TAKAO
分类号 H01L21/027;H01L21/331;G03F7/20;H01L21/8222 主分类号 H01L21/027
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