| 摘要 |
990,320. Crystal - pulling. SIEMENS & HALSKE A.G. Dec. 9, 1963 [Dec. 10, 1962], No. 48437/63. Heading BIS. A pulled crystal rod 5 is passed from a quartz vessel 1 through a gland system 9 comprising three chambers 9a-9c and four sealing rings 10a-10d of elastomeric material. Lower chambers 9a and 9b may be evacuated or a noble gas or hydrogen passed therethrough. Upper chamber 9c may be cooled by the passage of a coolant, e.g. oil or water, therethrough. Each sealing ring may have an aperture 5-10% smaller than the diameter of the rod. The elastomeric material may be natural or synthetic rubber or a silicone. The rod may be of silicon or germanium. The rod is pulled by means of two pairs of rollers 7 and 8 through gland system 9 from a melt 4 in a crucible 2 which is heated by an induction coil 3. The rod is guided from the melt by a sliding or roller guide 6 less than 2 cm. from the solidliquid interface. An upper pair of rollers 8<SP>1</SP> act as a slipping coupling during pulling, but pull at a higher rate when. the pulled rod is severed between rollers 7 and 8<SP>1</SP>, e.g. by induction, arc or oxyacetylene heating. |
