FORCE SENSOR

摘要

Disclosed is a force sensor having a simple configuration and a small height. The force sensor is provided with: a displacement section, which is composed of a silicon substrate having a predetermined thickness; a pressure receiving section, which is positioned on the front surface of the silicon substrate and receives a load from the outside; a plurality of piezoelectric resistance elements, which are disposed on the rear surface of the silicon substrate, said rear surface being on the reverse side of the surface having the pressure receiving section thereon, and which change the electric resistance thereof corresponding to the displacement quantity of the displacement section; and a plurality of electrically connecting supporting sections, which are formed on the rear surface of the silicon substrate such that the sections protrude from the surface, and which are electrically connected to the piezoelectric resistance elements, respectively, and support the displacement section on the further circumferential side than the piezoelectric resistance elements such that the displacement section is freely displaced.