| 摘要 |
In order to prevent cases in which it is difficult to detect small flaws and holes due to resolution constraints, and the like, an inspection apparatus is provided with surface shape measurement units (21, 13, 205, and 206) that measure the shape of a surface to be inspected (11), and image detection units (205, 206, and 27) that detect the light intensity distribution of the aforementioned surface to be inspected by illuminating the aforementioned surface to be inspected from a plurality of mutually different directions. |
