发明名称 POSITIVE RADIATION-SENSITIVE COMPOSITION, CURED FILM, AND METHOD FOR FORMING SAME
摘要 <p>Disclosed is a polysiloxane positive radiation-sensitive composition that has sufficient radiation sensitivity and excellent melt-flow resistance in a heating step after developing, and that is used favorably in forming: a cured film having excellent heat resistance, transparency, solvent resistance, and low dielectric properties; and a liquid crystal cell having a high voltage holding ratio. Further disclosed are the cured film formed from the composition, and a method for forming the cured film. The positive radiation-sensitive composition contains [A] a siloxane polymer, [B] a quinone diazide compound, and [C] a radiation-sensitive acid generator having a wavelength of maximum absorption that is shorter than the wavelength of maximum absorption of [B] the quinone diazide compound.</p>
申请公布号 WO2011065215(A1) 申请公布日期 2011.06.03
申请号 WO2010JP69856 申请日期 2010.11.08
申请人 JSR CORPORATION;HANAMURA MASAAKI;ICHINOHE DAIGO 发明人 HANAMURA MASAAKI;ICHINOHE DAIGO
分类号 G03F7/023;G03F7/004;G03F7/075 主分类号 G03F7/023
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