发明名称 ANALYSIS DISPLAY METHOD OF DEFECTIVE FACTORS AND ANALYSIS DISPLAY DEVICE OF DEFECTIVE FACTORS
摘要 <p>A calculation device (16) analyzes defective factors of a defective occurrence on the basis of representative values for manufacturing data and assay data of products gathered for each product. A display device (17), using calculations by way of statistical techniques, selects, from among a plurality of representative values that were analyzed, manufacturing data and assay data on which the representative values were based for data items extracted from analysis results, and displays the same.</p>
申请公布号 WO2011065428(A1) 申请公布日期 2011.06.03
申请号 WO2010JP71029 申请日期 2010.11.25
申请人 SHARP KABUSHIKI KAISHA;SHIMIZU, KAZUTOSHI 发明人 SHIMIZU, KAZUTOSHI
分类号 G05B19/418;G05B23/02;G06Q10/00;G06Q50/00;H01L21/02 主分类号 G05B19/418
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