VACUUM DRYER AND DRYING METHOD USING THE SAME

摘要

The present invention is directed to provide a vacuum dryer which offers a short drying time, does not leave stains and does not use isopropyl alcohol (IPA), thereby reducing the risk of fire and eliminating the production of pollutants, and a drying method using the same. As such, there are provided a dryer and a drying method using the same, wherein the dryer comprises: a vacuum chamber that has a dispenser nozzle formed at a cover part thereof and an outlet formed at the bottom for discharging gas therethrough; a stand that is placed within the vacuum chamber and is used as a site for arraying a plurality of wafers or disks thereon; and a punching plate that is placed between the stand and the outlet within the vacuum chamber and has a plurality of holes formed therein.