METHOD FOR PRODUCING MONOSILANE AND TETRAALKOXYSILANE

摘要

Disclosed is a method for producing monosilane and a tetraalkoxysilane, wherein an alkoxysilane represented by general formula (1) HnSi(OR)4-n (1) (wherein R represents an alkyl group having 1-6 carbon atoms and n represents an integer of 1-3) is subjected to a disproportionation reaction in a gaseous phase in the presence of an inorganic phosphate or a catalyst that has a specific chemical structure based on a heteropolyacid salt structure. In the production method, separation from the solvent can be carried out easily, the reaction proceeds quickly and the conversion rate of the starting materials is high.