| 发明名称 |
SUBSTRATE PROCESSING APPARATUS AND METHOD FOR MANUFACTURING DISPLAY ELEMENT |
| 摘要 |
<p>Disclosed is a substrate processing apparatus which is provided with: a processing section, which performs predetermined processing with respect to a substrate; and a substrate holding section, which moves with respect to the processing section, and which holds the substrate, while having the processed surface of the substrate being formed.</p> |
| 申请公布号 |
WO2011065478(A1) |
申请公布日期 |
2011.06.03 |
| 申请号 |
WO2010JP71124 |
申请日期 |
2010.11.26 |
| 申请人 |
NIKON CORPORATION;MIYAJI AKIRA;KIUCHI TOHRU;NARA KEI |
发明人 |
MIYAJI AKIRA;KIUCHI TOHRU;NARA KEI |
| 分类号 |
B65G49/06;H01L21/677;H01L51/50;H05B33/10 |
主分类号 |
B65G49/06 |
| 代理机构 |
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