发明名称 REACTOR AND METHOD FOR PRODUCTION OF SILICON
摘要 Reactor for production of silicon, comprising a reactor volume, distinctive in that the reactor comprises or is operatively arranged to at least one means for setting a silicon-containing reaction gas for chemical vapor deposition (CVD) into rotation inside the reactor volume. Method for production of silicon.
申请公布号 WO2011065839(A1) 申请公布日期 2011.06.03
申请号 WO2010NO00431 申请日期 2010.11.25
申请人 DYNATEC ENGINEERING AS;FILTVEDT, JOSEF;FILTVEDT, WERNER, O.;HOLT, ARVE 发明人 FILTVEDT, JOSEF;FILTVEDT, WERNER, O.;HOLT, ARVE
分类号 C01B33/027 主分类号 C01B33/027
代理机构 代理人
主权项
地址