LIGHT EMITTING DIODE ARRAY AND METHOD OF MANUFACTURING THE SAME

摘要

PURPOSE: A monolithic LED array with a serial or parallel wiring structure and a manufacturing method thereof are provided to implement a wiring structure with high reliability by forming a light emitting diode cell with a step structure through a mesa etching. CONSTITUTION: A substrate(101) has an uneven structure and an electric insulation property. A plurality of light emitting diode cells(C1,C2,C3) are respectively formed in a plurality of device areas surrounded by a convex part of an uneven structure. A plurality of light emitting diode cells have an n type semiconductor layer, a p type semiconductor layer, and an active layer between the n type semiconductor layer and the p type semiconductor layer. A wiring structure(105) electrically connects the n type semiconductor layer or p type semiconductor layer of the light emitting diode cell to the n type semiconductor layer or p type semiconductor layer of the other light emitting diode cell.