| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To suction-hold the surface of a sheet-like workpiece of the size larger than a transfer head in non-contact state. <P>SOLUTION: A nozzle 15 with an annular gas-jetting port 16 is fixed to the transfer head 11 wherein a recess 13 having a gas guide surface 14 is formed, while protruding in the recess 13, and a gas blown off from the gas-jetting port 16 is guided outward in the diameter direction along the gas guide surface 14. A plurality of gas-jetting holes 31a and 31b, through which the gas guided to the gas guide surface 14 is blown off toward the outer periphery of the front surface of a holding plate 25, are formed at the holding plate 25 attached to the transfer head 11, and further a gas-returning hole 32 for reverse-flowing part of the gas blown off from the gas-jetting holes 31a and 31b into the recess 13 is formed overlapping with an outer peripheral surface 15b of a nozzle 15. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
