| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a technique advantageous in order to obtain uniform illuminance distribution while illuminating a sample from the whole direction. <P>SOLUTION: The measuring instrument for illuminating the sample to detect the reflected light from the sample includes a light source, a columnar reflecting member having a columnar reflecting surface for reflecting the light having entered a first end over a plurality of times to emit the reflected light from a second end, a light reflector for reflecting the light emitted from the light source toward the first end and a detection part. The sample is illuminated by the light emitted from the second end and the light reflected by the sample to pass through the columnar reflecting member is detected by the detection part. The shape of the reflecting surface of the reflector in the cross section crossing the axis of the columnar reflecting member at a right angle is depressed toward the axis of the columnar reflecting member. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
